Ultra-precision positioning piezo stage with PK aperture type, XY axis
This is an XY-axis stage type with an opening (transparent hole) in the center of the movable table. It is ideal for use in combination with microscopes and light-transmitting devices.
This is a type of XY-axis stage with a PK opening, designed for ultra-precision positioning piezo stages. You can choose from five different models with strokes ranging from 100/100μm to 300/300μm and resolutions from 2/2nm to 6/6nm. This lineup features an opening (transparent hole) in the center of the moving table. It is suitable for laser transmission, fine observation combined with microscopes and analytical instruments, and high-precision mapping measurements. ■ From compact to large openings We offer a compact opening type suitable for small devices, as well as a large opening type that can align large panel substrates. ■ Smooth and precise scanning High-precision feedback control allows for reliable operation according to command signals. We also accommodate requests for special environments (vacuum, non-magnetic, etc.), so please feel free to consult with us. *For more details, please download the materials or feel free to contact us.
- Company：THKプレシジョン
- Price：Other
